Advanced Energy’s 4100T optical fiber thermometer improves temperature accuracy and control in advanced semiconductor processes
With better measurement accuracy and higher read rate, the 4100T multi-channel, non-contact optical fiber thermometer enables easy upgrade from market-leading OR4000T
COLORADO - Media OutReach - 24
November 2021 - Advanced Energy (Nasdaq: AEIS) – a global leader in highly engineered,
precision power conversion, measurement and control solutions – today introduced the
Sekidenko 4100T pyrometer. A drop-in replacement for Advanced Energy's market-leading
OR4000T, the 4100T optical fiber thermometer (OFT) delivers exceptional temperature
measurement accuracy, a wider temperature range and simultaneous multi-channel
maximum read speed for leading-edge semiconductor and adjacent thin-film applications.
"Advanced Energy's pyrometers are used by
top semiconductor OEMs due to our industry-leading performance.
The 4100T further extends our leadership with many enhancements beyond our
industry-leading OR4000T, enabling our customers to reach unmatched levels of process
control and manufacturability," said Jeff Hebb, vice president of marketing and applications, critical
sensing and control at Advanced Energy. "The feature-rich
4100T is a 'drop-in' replacement for OR4000T, making upgrades very
convenient for our existing customers. In addition, it supports EtherCAT,
serial and USB communications."
Up to four different temperatures
can be measured simultaneously using the 4100T, which reduces the number of control
boxes required for multi-point control, shrinks the form factor and delivers
cost-saving benefits. The high read rate of up to 1 kHz per channel enables
faster thermal response for better temperature control and uniformity of
leading-edge applications such as rapid thermal processing, laser annealing, atomic
layer deposition and other advanced deposition technologies.
The multi-channel OFT with
application-specific, configurable wavelength provides exceptional accuracy,
repeatability, reliability and fast read rates for the most demanding
temperature measurements. Traditional thermocouple and other contact sensor
measurements are undesirable for applications where physical contact with the wafer
can cause damage, contamination or measurement errors due to heat transfer
effects. The 4100T measures temperature directly with ±1.5°C accuracy in situ without
making contact with the object of interest. In addition to eliminating these
potential contact measurement issues, the 4100T is also an optimal solution for
applications where the wafer is in motion or is being processed at very high
temperatures or high ramp rates.
Advanced Energy (Nasdaq: AEIS) is a global leader in the design
and manufacturing of highly engineered, precision power conversion, measurement
and control solutions for mission-critical applications and processes. AE's
power solutions enable customer innovation in complex applications for a wide
range of industries including semiconductor equipment, industrial,
manufacturing, telecommunications, data center computing and healthcare. With engineering
know-how and responsive service and support around the globe, the company
builds collaborative partnerships to meet technology advances, propel growth
for its customers and innovate the future of power. Advanced Energy has devoted
four decades to perfecting power for its global customers and is headquartered
in Denver, Colorado, USA.